Edwards Group Launches New Integrated Vacuum Pump IPUP2 on Device Platform
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IPUP2 is designed to meet Applied Materials' load lock and transfer chamber vacuum specifications. IPUP2 extraction rate and power curve has been optimized to increase the machine output capacity, the maximum pumping speed up to 180m3 / h, 89% faster than the first generation, shortening the time of vacuum 54%, while saving energy 70% (using "green mode" can further save energy).
The precision bearings used in the pump ensure smooth running, low vibration, oil-lubricated bearings and timing gears, eliminating the need for routine maintenance between overhauls. IPUP2 includes horizontal and vertical air inlets, sized and configured for direct interchange with previous generation pumps. The pump scored high during the test, with an average failure interval (SemiE10 standard MTBF) of 5 years, enabling more than 3 million load-lock cycles.
IPUP2 advanced design to reduce the vacuum time about 50%, saving 70% energy saving, maintenance-free interval overhaul. Many semiconductor manufacturers, and even those that have long-term partnerships with our competitors, quickly recognize the IPP2's pumping and cost-of-ownership advantages through these orders.