Edwards Group Launches New Integrated Vacuum Pump IPUP2 on Device Platform

Edwards Group Co., the company has launched a new integrated transport for the load lock chamber and Applied Materials Manufacturing Platform application of vacuum IPUP2. This second-generation pump offers significant advantages in terms of load-lock vacuum time, energy consumption and maintenance requirements, all of which combine to deliver best-in-class performance and cost of ownership. The pump has achieved initial success, gaining usage certification on Applied's multi-class new equipment platform and has provided over 180 systems to major semiconductor manufacturers.
IPUP2 is designed to meet Applied Materials' load lock and transfer chamber vacuum specifications. IPUP2 extraction rate and power curve has been optimized to increase the machine output capacity, the maximum pumping speed up to 180m3 / h, 89% faster than the first generation, shortening the time of vacuum 54%, while saving energy 70% (using "green mode" can further save energy).
The precision bearings used in the pump ensure smooth running, low vibration, oil-lubricated bearings and timing gears, eliminating the need for routine maintenance between overhauls. IPUP2 includes horizontal and vertical air inlets, sized and configured for direct interchange with previous generation pumps. The pump scored high during the test, with an average failure interval (SemiE10 standard MTBF) of 5 years, enabling more than 3 million load-lock cycles.
IPUP2 advanced design to reduce the vacuum time about 50%, saving 70% energy saving, maintenance-free interval overhaul. Many semiconductor manufacturers, and even those that have long-term partnerships with our competitors, quickly recognize the IPP2's pumping and cost-of-ownership advantages through these orders.

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